High throughput 3D x-ray imaging system using a transmission x-ray source

US12153001B2 · kind B2 · utility

Assignee

• Sigray, Inc. · US

Inventors

• David Vine · Berkeley, US
• Wenbing Yun · Walnut Creek, US
• Janos Kirz · Berkeley, US
• Sheraz Gul · San Ramon, US
• Sylvia Jia Yun Lewis · San Francisco, US
• Richard Ian Spink · Pleasant Hill, US

Key dates

• Filing date: May 3, 2023
• Grant date: Nov 26, 2024
• Expiry date: May 3, 2043

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2223/309
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A three-dimensional x-ray imaging system includes at least one detector and an x-ray source including an x-ray transmissive vacuum window. The x-ray source is configured to produce diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending through a region of interest of an object to the at least one detector. The diverging x-rays have propagation paths within an angular divergence angle greater than 1 degree centered on the x-ray propagation axis. The system further includes at least one sample motion stage configured to rotate the object about a rotation axis. The system further includes a sample mount configured to hold the object and comprises a first portion in the propagation paths of at least some of the diverging x-rays and having an x-ray transmission greater than 30% for x-rays having energies greater than 50% of a maximum x-ray energy of an x-ray spectrum of the diverging x-rays.