Edge coupler and waveguide structure and forming method thereof
US12153261B2 · kind B2 · utility
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4References
20Claims
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Key dates
| Filing date | Jul 13, 2022 |
| Grant date | Nov 26, 2024 |
| Priority date | — |
| Expiry date | Jan 31, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12147
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An edge coupler, a waveguide structure and a method for forming a waveguide structure are provided. The edge coupler includes a substrate, a first cladding layer, a core layer and a first anti-reflection coating layer. The first cladding layer has a second sidewall aligned with a first sidewall of the substrate. The core layer has a third sidewall aligned with the second sidewall. The anti-reflection coating layer lines the first sidewall, the second sidewall and the third sidewall. A thickness of the anti-reflection coating layer varies along the first sidewall, the second sidewall and the third sidewall.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.