Susceptor for high-temperature use having shaft with low thermal conductivity
US12154799B2 · kind B2 · utility
1Cited by
4References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 2, 2022 |
| Grant date | Nov 26, 2024 |
| Priority date | — |
| Expiry date | Sep 2, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B3/143
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed is a susceptor for high-temperature use having a shaft with low thermal conductivity, wherein in a susceptor including a plate for wafer mounting and a shaft coupled to the plate, the plate and the shaft each include a sintered body having 90 wt % or more of an AlN phase, the sintered body of the plate is a magnesium-containing AlN sintered body having a volume resistance of 5*108 Ω·cm or more at 650° C., and the sintered body of the shaft is an AlN sintered body having a room-temperature thermal conductivity of 100 W/mK or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.