Inductively coupled plasma light source with switched power supply
US12156322B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 8, 2022 |
| Grant date | Nov 26, 2024 |
| Priority date | — |
| Expiry date | Mar 22, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B41/2806
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for generating light includes a chamber having a high voltage region, a low voltage region, and a plasma generation region that defines a plasma confinement region. A magnetic core is positioned around the chamber and is configured to generate a plasma in the plasma confinement region. A switched power supply includes a DC power supply and a switched resonant charging circuit that together generate a plurality of voltage pulses at the output causing a plurality of current pulses to be applied to the power delivery section around the magnetic core so that at least one plasma loop is established around the magnetic core that confines plasma in the plasma confinement region, thereby forming a magnetically confined Z-pinch plasma. Light generated by the Z-pinch plasma propagates out of a port in the light source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.