Matthew Besen
32Patents
13h-index
33Co-inventors
81Inventor score
Filing activity: Jun 4, 1993 → May 14, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5501740A | Microwave plasma reactor | Electricity | 445 | Expired |
| US7307375B2 | Inductively-driven plasma light source | Electricity | 68 | Expired |
| US5637279A | Ozone and other reactive gas generator cell and system | Chemistry; Metallurgy | 49 | Expired |
| US7948185B2 | Inductively-driven plasma light source | Electricity | 48 | Active |
| US8143790B2 | Method for inductively-driven plasma light source | Electricity | 47 | Active |
| US8525138B2 | Laser-driven light source | Emerging Cross-Sectional Technologies | 42 | Active |
| US6872909B2 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | Electricity | 40 | Expired |
| US5688382A | Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate | Electricity | 40 | Expired |
| US5556475A | Microwave plasma reactor | Electricity | 32 | Expired |
| US7615120B2 | Pulsed mass flow delivery system and method | Emerging Cross-Sectional Technologies | 30 | Active |
| US6508631B1 | Radial flow turbomolecular vacuum pump | Mechanical Engineering; Lighting; Heating | 18 | Expired |
| US5568015A | Fluid-cooled dielectric window for a plasma system | Electricity | 16 | Expired |
| US7829353B2 | Pulsed mass flow delivery system and method | Emerging Cross-Sectional Technologies | 13 | Active |
| US7628860B2 | Pulsed mass flow delivery system and method | Emerging Cross-Sectional Technologies | 13 | Expired |
| US5625259A | Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube | Electricity | 12 | Expired |
| US7501600B2 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | Electricity | 9 | Active |
| US7659489B2 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | Electricity | 6 | Active |
| US6781119B2 | Ion storage system | Electricity | 5 | Expired |
| US7569791B2 | Inductively-driven plasma light source | Emerging Cross-Sectional Technologies | 5 | Active |
| US11587781B2 | Laser-driven light source with electrodeless ignition | Emerging Cross-Sectional Technologies | 3 | Active |
| US7199384B2 | Inductively-driven light source for lithography | Electricity | 2 | Expired |
| US7183717B2 | Inductively-driven light source for microscopy | Electricity | 2 | Expired |
| US11784037B2 | Laser-driven light source with electrodeless ignition | Emerging Cross-Sectional Technologies | 2 | Active |
| US7073771B2 | Porous valve assembly | Emerging Cross-Sectional Technologies | 2 | Expired |
| US7238266B2 | Method and apparatus for fluorine generation and recirculation | Performing Operations; Transporting | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.