Phase change switch with multi face heater configuration

US12156488B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Dominik Heiss · Munich, DE
• Martin Bartels · Dresden, DE
• Christoph Glacer · Munich, DE
• Christoph Kadow · Gauting, DE
• Matthias Markert · Haßfurt, DE
• Hans Taddiken · Munich, DE
• Hans-Dieter Wohlmuth · Munich, DE

Key dates

• Filing date: Dec 21, 2022
• Grant date: Nov 26, 2024
• Expiry date: Dec 21, 2042

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N70/8828

Abstract

A method includes providing a substrate having a main surface, forming a layer of thermally insulating material on the main surface, forming strips of phase change material on the layer of thermally insulating material such that strips of phase change material are separated from the main surface by thermally insulating material, forming first and second RF terminals on the main surface that are laterally spaced apart from one another and connected to the strips of phase change material, and forming a heater structure having heating elements that are configured to control a conductive connection between the first and second RF terminals by applying heat to the one or more strips of phase change material, wherein each of the strips of phase change material includes multiple outer faces, and wherein portions of both outer faces from the strips of phase change material are disposed against one of the heating elements.