Process for the production of a molecular layer and electronic component comprising same

US12163223B2 · kind B2 · utility

Assignee

• Merck Patent GmbH · DE

Inventors

• Peer Kirsch · Darmstadt, DE
• Sebastian Resch · Mainz, DE
• Henning Seim · Darmstadt, DE
• Jacob Woodruff · Scottsdale, US
• Charith Nanayakkara · Haverhill, US

Key dates

• Filing date: Oct 28, 2020
• Grant date: Dec 10, 2024
• Expiry date: Jul 8, 2041

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C09K2019/3408
• WIPO field: Basic materials chemistry
• WIPO sector: Chemistry

Abstract

A process is described for production of a molecular layer on a substrate using atomic layer deposition (ALD) techniques, for use in electronic components, in particular, in memory elements of the ReRAM type. Additionally, compounds for production of the molecular layer are disclosed, as well as memory elements containing the molecular layer.