Nanoscale thin film deposition systems

US12168244B2 · kind B2 · utility

Assignee

• The Board of Regents of the University of Texas System · US

Inventors

• Sidlgata V. Sreenivasan · Austin, US
• Parth Pandya · Austin, US
• David Choi · Gatineau, CA
• Shrawan Singhal · Austin, US
• Lawrence R. Dunn · Austin, US

Key dates

• Filing date: Feb 25, 2021
• Grant date: Dec 17, 2024
• Expiry date: Feb 25, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B27/0025
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A method and system for nanoscale precision programmable profiling on substrates. Profiling material is dispensed on a substrate or a superstrate. The superstrate is brought in contact with the substrate. The profiling material is then cured after bringing the superstrate in contact with the substrate. The superstrate is separated from the substrate after curing. An optical metrology of points on the substrate corresponding to the final substrate profile is then performed.