EUV light source with a beam positioning device

US12171054B2 · kind B2 · utility

Assignee

• TRUMPF Lasersystems for Semiconductor Manufacturing GmbH · DE

Inventors

• Martin Lambert · Buckingham, GB
• Boris Regaard · Gerlingen, DE
• Tolga Ergin · Bietigheim-Bissingen, DE
• Oliver Schlosser · Bonlanden, DE

Key dates

• Filing date: Apr 24, 2024
• Grant date: Dec 17, 2024
• Expiry date: Apr 24, 2044

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B1/11
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An extreme ultraviolet (EUV) light source includes a providing device for providing a target material, a pulsed laser source for emitting a pulsed laser beam, and a beam guidance device for supplying the pulsed laser beam from the pulsed laser source into a radiation generation chamber and for focused irradiation of the target material with the pulsed laser beam. The target material is configured to emit EUV radiation on account of the irradiation. The beam guidance device includes a beam positioning device comprising four mirrors as two mirror pairs for positioning the pulsed laser beam. Each of the four mirrors is rotatable about exactly one axis of rotation. The axes of rotation of the two mirrors of a first mirror pair are aligned along a first spatial direction. The axes of rotation of the two mirrors of a second mirror pair are aligned along a second spatial direction.