Patent · US Active

Processing image data sets

US12175650B2 · kind B2 · utility

1Cited by

0References

24Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Jens Timo Neumann · Shanghai, CN
Abhilash Srikantha · Neu-Ulm, DE
Christian Wojek · Aalen, DE
Thomas Korb · Schwäbisch Gmünd, DE

Key dates

Filing date	Jul 29, 2021
Grant date	Dec 24, 2024
Priority date	—
Expiry date	Dec 20, 2042

Classification

Technology area (CPC G)Physics
CPC primaryG06V2201/06
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

A method includes obtaining an image data set that depicts semiconductor components, and applying a hierarchical bricking to the image data set. In this case, the bricking includes a plurality of bricks on a plurality of hierarchical levels. The bricks on different hierarchical levels have different image element sizes of corresponding image elements.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.