Storage capacitor with multiple dielectrics

US12176386B2 · kind B2 · utility

Assignee

• NANYA TECHNOLOGY CORPORATION · TW

Inventors

• Kai-Hung Lin · Taichung, TW
• Jyun-Hua Yang · Taipei, TW

Key dates

• Filing date: May 24, 2022
• Grant date: Dec 24, 2024
• Expiry date: Jan 27, 2043

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D1/696

Abstract

The present application provides a storage capacitor with multiple dielectrics. The storage capacitor includes a lower electrode, an upper electrode, a first dielectric layer, a second dielectric layer and a third dielectric layer. The first dielectric layer covers the lower electrode, the second dielectric layer is disposed on the first dielectric layer, and the third dielectric layer is disposed on the second dielectric layer. The upper electrode is disposed on the third dielectric layer.