X-ray system
US12181427B1 · kind B1 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 13, 2022 |
| Grant date | Dec 31, 2024 |
| Priority date | — |
| Expiry date | Dec 13, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/50
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sample inspection system (100) includes an X-ray emitter, a collimator (170) and a first energy resolving detector (180) arranged along a symmetry axis (105). The X-ray emitter generates at least one focused conical shell beam (150) of X-ray radiation comprised of X-ray photons that propagate through a focal point on the symmetry axis downstream of the X-ray emitter. The collimator (170) has one or more channels, each channel being adapted to receive diffracted or scattered radiation propagating either along the symmetry axis, or parallel with the symmetry axis, or both along and parallel with the symmetry axis (105). Upon incidence of the conical shell beam (150) onto a sample (106) the first energy resolving detector (180) detects radiation diffracted or scattered by the sample (106) via the collimator (170).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.