Control of semiconductor manufacturing equipment in mixed reality environments
US12181849B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 11, 2022 |
| Grant date | Dec 31, 2024 |
| Priority date | — |
| Expiry date | Apr 11, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2200/24
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Various embodiments herein relate to a Mixed Reality (MR) control platform to operate a semiconductor manufacturing tool in an MR environment and to display data associated with the semiconductor manufacturing tool. In son embodiments, the MR control platform comprises an MR control system and an MR headset. The MR control system can obtain sensor data representative of sensor output from a semiconductor manufacturing tool. The MR control system can determine operational information associated with the semiconductor manufacturing tool and based on the sensor data. The MR control system can cause the operational information to be transmitted to the MR headset. The MR headset can receive the operational information associated with the semiconductor manufacturing tool from the MR control system. The MR headset can cause content associated with the operational information and one or more control features to be rendered in an MR environment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.