Patent · US Active

Process and device for providing vapor

US12188122B2 · kind B2 · utility

0Cited by

1References

23Claims

0Family size

Assignee

SINGULUS TECHNOLOGIES AG · DE

Inventors

Oliver Hohn · Grundau, DE
Michael Reising · Mömbris, DE
Johannes Grübler · Löbschütz, DE
Kurt Pietsch · Minden, DE
Jörg Koch · Kandern, DE

Key dates

Filing date	Mar 20, 2019
Grant date	Jan 7, 2025
Priority date	—
Expiry date	Aug 21, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG05D23/19
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

The present invention is directed to a method and an apparatus for providing vapor for a discontinuous process.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.