SINGULUS TECHNOLOGIES AG
32Patents
16Active
32Granted
47Portfolio score
Filing activity: Feb 18, 1997 → Jun 25, 2021 · 5 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5876082A | Device for gripping and holding substrates | Physics | 71 | Expired |
| US5913653A | Device for transporting substrates | Emerging Cross-Sectional Technologies | 30 | Expired |
| US5863399A | Device for cathode sputtering | Electricity | 21 | Expired |
| US5863328A | Device for surface coating or lacquering of substrates | Physics | 19 | Expired |
| US6344114B1 | Magnetron sputtering cathode with magnet disposed between two yoke plates | Electricity | 19 | Expired |
| US5766359A | Device for surface coating or lacquering of substrates | Performing Operations; Transporting | 18 | Expired |
| US5800687A | Device for masking or covering substrates | Electricity | 16 | Expired |
| US6338781B1 | Magnetron sputtering cathode with magnet disposed between two yoke plates | Electricity | 16 | Expired |
| US7799179B2 | Sputtering cathode and device and method for coating a substrate with several layers | Electricity | 16 | Expired |
| US6261403A | Method for preventing bubbles or small bubbles when connecting substrate parts of optical data carriers by means of an adhesive | Physics | 15 | Expired |
| US6814825B2 | Method and device for controlling thickness during spin coating | Physics | 13 | Expired |
| US9347131B2 | Coating substrates with an alloy by means of cathode sputtering | Electricity | 12 | Active |
| US9842755B2 | Method and system for naturally oxidizing a substrate | Emerging Cross-Sectional Technologies | 11 | Active |
| US6368435B1 | Device and method for transporting separate substrates | Emerging Cross-Sectional Technologies | 10 | Expired |
| US6054029A | Device for gripping, holdings and/or transporting substrates | Electricity | 9 | Expired |
| US6096180A | Cathodic sputtering device | Electricity | 7 | Expired |
| US5879121A | Substrate transporting apparatus | Emerging Cross-Sectional Technologies | 6 | Expired |
| US8062705B2 | Method and apparatus for control of layer thicknesses | Performing Operations; Transporting | 4 | Active |
| US8961094B2 | Method and device for aligning substrates | Emerging Cross-Sectional Technologies | 3 | Active |
| US11062929B2 | Device and method for treating substrates using a support roller having a porous material | Electricity | 1 | Active |
| US9845202B2 | Method and device for stringing substrates together in coating systems | Performing Operations; Transporting | 1 | Active |
| US8903125B2 | Method and device for identifying objects and for tracking objects in a production process | Physics | 1 | Active |
| US7520954B2 | Method and apparatus for separating disc-shaped substrates | Emerging Cross-Sectional Technologies | 1 | Expired |
| US8740537B2 | Transport device having a deflectable sealing frame | Electricity | 1 | Active |
| US12188122B2 | Process and device for providing vapor | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.