Patent assignee · DE · COMPANY

SINGULUS TECHNOLOGIES AG

32Patents
16Active
32Granted
47Portfolio score

Filing activity: Feb 18, 1997 → Jun 25, 2021 · 5 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US5876082A Device for gripping and holding substrates Physics 71 Expired
US5913653A Device for transporting substrates Emerging Cross-Sectional Technologies 30 Expired
US5863399A Device for cathode sputtering Electricity 21 Expired
US5863328A Device for surface coating or lacquering of substrates Physics 19 Expired
US6344114B1 Magnetron sputtering cathode with magnet disposed between two yoke plates Electricity 19 Expired
US5766359A Device for surface coating or lacquering of substrates Performing Operations; Transporting 18 Expired
US5800687A Device for masking or covering substrates Electricity 16 Expired
US6338781B1 Magnetron sputtering cathode with magnet disposed between two yoke plates Electricity 16 Expired
US7799179B2 Sputtering cathode and device and method for coating a substrate with several layers Electricity 16 Expired
US6261403A Method for preventing bubbles or small bubbles when connecting substrate parts of optical data carriers by means of an adhesive Physics 15 Expired
US6814825B2 Method and device for controlling thickness during spin coating Physics 13 Expired
US9347131B2 Coating substrates with an alloy by means of cathode sputtering Electricity 12 Active
US9842755B2 Method and system for naturally oxidizing a substrate Emerging Cross-Sectional Technologies 11 Active
US6368435B1 Device and method for transporting separate substrates Emerging Cross-Sectional Technologies 10 Expired
US6054029A Device for gripping, holdings and/or transporting substrates Electricity 9 Expired
US6096180A Cathodic sputtering device Electricity 7 Expired
US5879121A Substrate transporting apparatus Emerging Cross-Sectional Technologies 6 Expired
US8062705B2 Method and apparatus for control of layer thicknesses Performing Operations; Transporting 4 Active
US8961094B2 Method and device for aligning substrates Emerging Cross-Sectional Technologies 3 Active
US11062929B2 Device and method for treating substrates using a support roller having a porous material Electricity 1 Active
US9845202B2 Method and device for stringing substrates together in coating systems Performing Operations; Transporting 1 Active
US8903125B2 Method and device for identifying objects and for tracking objects in a production process Physics 1 Active
US7520954B2 Method and apparatus for separating disc-shaped substrates Emerging Cross-Sectional Technologies 1 Expired
US8740537B2 Transport device having a deflectable sealing frame Electricity 1 Active
US12188122B2 Process and device for providing vapor Physics 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.