Air curtain device and workpiece processing tool
US12188686B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 29, 2022 |
| Grant date | Jan 7, 2025 |
| Priority date | — |
| Expiry date | Mar 23, 2043 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF24F3/163
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present disclosure is at least directed to utilizing air curtain devices to form air curtains to separate and isolate areas in which respective workpieces are stored from a transfer compartment within a workpiece processing apparatus. The transfer compartment of the workpiece processing apparatus includes a robot configured to transfer or transport ones of the workpieces to and from these respective storage areas through the transfer compartment and to and from a tool compartment. A tool is present in the tool compartment for processing and refining the respective workpieces. Clean dry air (CDA) may be circulated through the respective storage areas. The air curtains formed by the air curtain devices and the circulation of CDA through the respective storage areas reduces the likelihood of the generation of defects, damages, and degradation of the workpieces when present within the workpiece processing apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.