Embedded cooling systems and methods of manufacturing embedded cooling systems
US12191233B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 28, 2022 |
| Grant date | Jan 7, 2025 |
| Priority date | — |
| Expiry date | Apr 13, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/059
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Embodiments herein provide for fluidic cooling assemblies embedded within a device package and related manufacturing methods. In one embodiment, the cooling assembly includes a cold plate body attached to a singulated device and a manifold lid attached to the cold plate body. The cold plate body has a first side adjacent to the singulated device and an opposite second side, and the manifold lid is attached to the second side. In some embodiments, the first side of the cold plate body and the backside of the singulated device each comprise a dielectric material surface, the cold plate body is attached to the singulated device by direct dielectric bonds formed between the dielectric material surfaces, the cold plate body, and the manifold lid define one or more cavities, and the one or more cavities form at least a portion of a fluid flow path from an inlet to an outlet of the manifold lid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.