Controller and control techniques for linear accelerator and ion implanter having linear accelarator
US12193140B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 22, 2022 |
| Grant date | Jan 7, 2025 |
| Priority date | — |
| Expiry date | Jan 29, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2007/225
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus may include global control module, the global control module including a digital master clock generator and a master waveform generator. The apparatus may also include a plurality of resonator control modules, coupled to the global control module. A given resonator control module of the plurality of resonator control modules may include a synchronization module, having a first input coupled to receive a resonator output voltage pickup signal from a local resonator, a second input coupled to receive a digital master clock signal from the digital master clock generator, and a first output coupled to send a delay signal to the master waveform generator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.