Driving signal parameter variation for driving MEMS mirrors for synchronization control and tuning Lissajous scanning

US12196950B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Han Woong Yoo · Wien, AT
• Stephan Gerhard Albert · Munich, DE
• David Brunner · Dobersberg, AT
• Norbert Druml · Graz, AT
• Selma KARIC · Graz, AT
• Leonhard NIEDERMUELLER · Graz, AT
• Georg Schitter · Wien, AT
• Richard SCHROEDTER · Doren, AT

Key dates

• Filing date: Apr 1, 2021
• Grant date: Jan 14, 2025
• Expiry date: Nov 16, 2043

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/085
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method of Lissajous scanning includes driving a first oscillator structure about a first rotation axis at a first resonance frequency according to a first driving signal, and driving a second oscillator structure about a second rotation axis at a second resonance frequency according to second driving signal different from the first resonance frequency. The first driving signal has a first low level, a first high level, and a first duty cycle, the combination of which produces the first resonance frequency, and the second driving signal has a second low level, a second high level, and a second duty cycle, the combination of which produces the second resonance frequency. At least one of the second low level, the second high level, and the second duty cycle is different from the first low level, the first high level, and the first duty cycle, respectively.