Non-conformal oxide liner and manufacturing methods thereof
US12199158B2 · kind B2 · utility
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8References
20Claims
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Key dates
| Filing date | Mar 6, 2023 |
| Grant date | Jan 14, 2025 |
| Priority date | — |
| Expiry date | Mar 6, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/038
Abstract
A method includes forming a fin protruding over a substrate; forming a conformal oxide layer over an upper surface and along sidewalls of the fin; performing an anisotropic oxide deposition or an anisotropic plasma treatment to form a non-conformal oxide layer over the upper surface and along the sidewalls of the fin; and forming a gate electrode over the fin, the conformal oxide layer and the non-conformal oxide layer being between the fin and the gate electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.