EUV microscope
US12203874B2 · kind B2 · utility
0Cited by
3References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 23, 2022 |
| Grant date | Jan 21, 2025 |
| Priority date | — |
| Expiry date | Apr 21, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/95676
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An EUV microscope apparatus utilizing a source of EUV light. The light is sent to a collector which creates a first focused EUV beam. A monochromator module receives the first focused EUV beam and produces a second focused EUV beam that is passed to an illumination module. The output of the illumination module is reflected off a mask. The reflected beam from the mask is sent to a zone-plate and a detector to produce an image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.