EUV Tech, Inc.
2Patents
2Active
2Granted
53Portfolio score
Filing activity: Oct 15, 2021 → Aug 23, 2022
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11960202B1 | EUV mask defect tool apparatus | Physics | 1 | Active |
| US12203874B2 | EUV microscope | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.