Method and apparatus for plasma ignition in toroidal plasma sources
US12207385B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 22, 2023 |
| Grant date | Jan 21, 2025 |
| Priority date | — |
| Expiry date | Aug 12, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2242/10
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A plasma apparatus of a plasma processing system is provided. The plasma apparatus defines a toroidal plasma channel and includes multiple end blocks defining respective portions of the toroidal plasma channel. Each end block includes an end-block tube constructed from a first electrically conductive material and a dielectric coating disposed on an interior surface of the end-block tube. The plasma apparatus also includes multiple mid-blocks defining respective portions of the toroidal plasma channel. Each mid-block includes at least one heat sink located adjacent to a substantially linear tube with a thermal interface disposed therebetween. The thermal interface is in physical communication with the tube and the at least one heat sink. The mid-block tube has a substantially uniform wall thickness and is constructed from a dielectric material. The at least one heat sink is constructed from a second electrically conductive material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.