Apparatus and method to assess sub-micron particle levels of a sample
US12209940B2 · kind B2 · utility
0Cited by
3References
20Claims
0Family size
Inventors
Key dates
| Filing date | Apr 27, 2021 |
| Grant date | Jan 28, 2025 |
| Priority date | — |
| Expiry date | Jan 16, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/1024
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides systems and methods for determining the cleanliness of a sample, the method including impinging high pressure fluid pulses on a sample disposed in a chamber to liberate particles therefrom and quantifying a number of the liberated particles to determine the cleanliness of the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.