Particle sensor
US12209942B2 · kind B2 · utility
0Cited by
0References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 22, 2019 |
| Grant date | Jan 28, 2025 |
| Priority date | — |
| Expiry date | May 9, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/0046
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
According to an example aspect of the present invention, there is provided an apparatus comprising a microelectromechanical, MEMS, capacitor comprising two plates and a gap between the plates, a gas conveyor configured to cause gas to flow through the gap, and readout circuitry configured to measure a capacitance of the MEMS capacitor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.