Markku Ylilammi
23Patents
7h-index
18Co-inventors
66Inventor score
Filing activity: Feb 8, 1982 → Mar 24, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6812619B1 | Resonator structure and a filter comprising such a resonator structure | Electricity | 206 | Expired |
| US6051907A | Method for performing on-wafer tuning of thin film bulk acoustic wave resonators (FBARS) | Electricity | 189 | Expired |
| US5873154A | Method for fabricating a resonator having an acoustic mirror | Emerging Cross-Sectional Technologies | 139 | Expired |
| US6788170B1 | Resonator structure having a dampening material and a filter having such a resonator structure | Electricity | 87 | Expired |
| US6515558B1 | Thin-film bulk acoustic resonator with enhanced power handling capacity | Electricity | 64 | Expired |
| US4416933A | Thin film electroluminescence structure | Emerging Cross-Sectional Technologies | 43 | Expired |
| US6839946B2 | Method for fabricating a thin film bulk acoustic wave resonator (FBAR) on a glass substrate | Emerging Cross-Sectional Technologies | 35 | Expired |
| US10790801B2 | Loaded resonators for adjusting frequency response of acoustic wave resonators | Electricity | 3 | Active |
| US10630256B2 | Two-stage lateral bulk acoustic wave filter | Electricity | 3 | Active |
| US11290083B2 | Loaded resonators for adjusting frequency response of acoustic wave resonators | Electricity | 2 | Active |
| US6521100B2 | Method of producing a piezoelectric thin film and bulk acoustic wave resonator fabricated according to the method | Emerging Cross-Sectional Technologies | 2 | Expired |
| US10756696B2 | Lateral bulk acoustic wave filter | Electricity | 2 | Active |
| US11057013B2 | Two-stage lateral bulk acoustic wave filter | Electricity | 1 | Active |
| US11088670B2 | Loaded series resonators for adjusting frequency response of acoustic wave resonators | Electricity | 1 | Active |
| US8925163B2 | Method of manufacturing laterally coupled BAW thin films | Emerging Cross-Sectional Technologies | 1 | Active |
| US11913859B2 | Trapping and releasing particles carried by gas sample | Physics | 0 | Active |
| US12341491B2 | Loaded resonators for adjusting frequency response of acoustic wave resonators | Electricity | 0 | Active |
| US11223341B2 | Suppressing parasitic sidebands in lateral bulk acoustic wave resonators | Electricity | 0 | Active |
| US11381220B2 | Lateral bulk acoustic wave filter | Electricity | 0 | Active |
| US12184264B2 | Two-stage lateral bulk acoustic wave filter with capacitive coupling of counter electrode | Electricity | 0 | Active |
| US11894827B2 | Loaded series resonators for adjusting frequency response of acoustic wave resonators | Electricity | 0 | Active |
| US11870408B2 | Two-stage lateral bulk acoustic wave filter | Electricity | 0 | Active |
| US12209942B2 | Particle sensor | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.