Optical measurement tool containing chromatic aberration enhancement component and optical alignment method using the same
US12211724B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 10, 2022 |
| Grant date | Jan 28, 2025 |
| Priority date | — |
| Expiry date | Dec 10, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2223/54426
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An optical alignment method includes providing an emitted radiation beam which includes a first peak wavelength and a second peak wavelength to a chromatic aberration enhancement component which increases a chromatic aberration of the emitted radiation beam, providing a first incident radiation beam having the first peak wavelength and a second incident radiation beam having the second peak wavelength which is shorter than the first peak wavelength to respective first and second alignment marks located at different vertical levels in a device under test, detecting reflected radiation from the first and second alignment marks, and using the detected reflected radiation for optical alignment of layers in the device under test.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.