Variable-pulse-width flat-top laser device and operating method therefor
US12214442B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 26, 2024 |
| Grant date | Feb 4, 2025 |
| Priority date | — |
| Expiry date | Jan 26, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Provided is a laser device. A laser device includes a light source unit configured to emit a first laser beam and a second laser beam, and a beam shaping unit configured to receive the first laser beam and the second laser beam on an incident surface and to shape the first laser beam and the second laser beam into a first processing beam, wherein the beam shaping unit is further configured, to have the incident surface including four quadrants, to receive the first laser beam on a first quadrant and the second laser beam on a second quadrant, and to shape the first laser beam and the second laser beam being emitted at different timing from the first laser beam into the first processing beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.