Semiconductor product with edge integrity detection structure
US12216153B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Mar 21, 2022 |
| Grant date | Feb 4, 2025 |
| Priority date | — |
| Expiry date | Mar 21, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L23/562
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor product, which comprises a semiconductor chip, an edge integrity detection structure extending along at least part of an edge of the semiconductor chip, and evaluation circuitry formed in and/or on the semiconductor chip, being electrically connected with the edge integrity detection structure, and being configured to evaluate an electric characteristic of the edge integrity detection structure to provide an evaluation signal indicative of a detected edge integrity status of the edge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.