Air-spaced encapsulated dielectric nanopillars for flat optical devices

US12216243B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Ludovic Godet · Sunnyvale, US
• Tapashree Roy · Kanchinakote, IN
• Prerna Goradia · Mumbai, IN
• Srobona SEN · Mumbai, IN
• Robert Jan Visser · Menlo Park, US
• Nitin Deepak · Ashti, IN
• Tapash Chakraborty · Mumbai, IN

Key dates

• Filing date: Jun 18, 2020
• Grant date: Feb 4, 2025
• Expiry date: Jun 24, 2043

Classification

• Technology area (CPC G): Physics
• CPC primary: G02F1/13398
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Embodiments described herein relate to flat optical devices and methods of forming flat optical devices. One embodiment includes a substrate having a first arrangement of a first plurality of pillars formed thereon. The first arrangement of the first plurality of pillars includes pillars having a height h and a lateral distance d, and a gap g corresponding to a distance between adjacent pillars of the first plurality of pillars. An aspect ratio of the gap g to the height h is between about 1:1 and about 1:20. A first encapsulation layer is disposed over the first arrangement of the first plurality of pillars. The first encapsulation layer has a refractive index of about 1.0 to about 1.5. The first encapsulation layer, the substrate, and each of the pillars of the first arrangement define a first space therebetween. The first space has a refractive index of about 1.0 to about 1.5.