Method for manufacturing semiconductor device
US12218207B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 15, 2024 |
| Grant date | Feb 4, 2025 |
| Priority date | — |
| Expiry date | Jan 15, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/258
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for manufacturing a semiconductor device including steps as follows is provided. A first nitride-based semiconductor layer is formed over a substrate. A second nitride-based semiconductor layer is formed on the first nitride-based semiconductor layer. A gate electrode is formed over the second nitride-based semiconductor layer. A first passivation layer is formed on the second nitride-based semiconductor layer to cover the gate electrode. A first blanket field plate is formed on the first passivation layer. The first blanket field plate is patterned to form a first field plate above the gate electrode using a wet etching process. A second passivation layer is formed on the first passivation layer to cover the first field plate. A second blanket field plate is formed on the second passivation layer. The second blanket field plate is patterned to form a second field plate above the first field plate using a dry etching process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.