Paddle configuration for a particle coating reactor

US12220678B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Govindraj Desai · Kanchinakote, IN
• Sekar Krishnasamy · Kanchinakote, IN
• Sumedh Acharya · Santa Clara, US
• Dakshalkumar Patel · Sayla, IN
• Jonathan Frankel · Los Gatos, US
• Quoc Truong · San Ramon, US
• Mario Cambron · San Jose, US
• Ravindra Patil · Thane, IN

Key dates

• Filing date: Oct 16, 2020
• Grant date: Feb 11, 2025
• Expiry date: Mar 31, 2042

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B05D2258/00
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a chemical delivery system, and a paddle assembly. The paddle assembly includes a rotatable drive shaft and a first plurality of paddles and a second plurality of paddles that extend radially from the drive shaft. The spacing, cross-sections, and oblique angles of the paddles are such that orbiting of the paddles causes the first plurality of paddles and the second plurality of paddles to displace substantially equal volumes in opposite directions in the lower portion of the stationary vacuum chamber.