Patent · US Active

Guided flow valve assembly and system incorporating same

US12222039B2 · kind B2 · utility

0Cited by
42References
23Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMar 17, 2022
Grant dateFeb 11, 2025
Priority date—
Expiry dateMar 17, 2042

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/67017
  • WIPO fieldMechanical elements
  • WIPO sectorMechanical engineering

Abstract

Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow frequently rely on valves which can provide flows at different rates and in a minimally turbulent manner. In one embodiment, a valve assembly is disclosed, the valve assembly having a valve body, a closure member, a seat, and a radial flow guide. The radial flow guide has a plurality of flow passages. The closure member has a needle, the needle having a plurality of grooves therein. The resulting valve assembly enables improved control of fluid and reduces turbulence in the resultant flow.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.