Electrostatic actuation for diffractive optical devices
US12222491B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 23, 2022 |
| Grant date | Feb 11, 2025 |
| Priority date | — |
| Expiry date | Aug 19, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/1852
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical device includes first and second planar substrates having respective first and second faces and including first and second diffractive structure disposed respectively on the first and second faces. First and second planar electrodes are disposed respectively on the first and second faces. A mount holds the second planar substrate parallel to the first planar substrate, with the second face adjacent to the first face and with the first and second planar electrodes in mutual proximity, while permitting the second planar substrate to move transversely relative to the first planar substrate. A control circuit is coupled to apply an electrical potential between the first and second planar electrodes with a voltage sufficient to shift the second diffractive structure transversely relative to the first diffractive structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.