Electron microscope
US12224153B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 3, 2021 |
| Grant date | Feb 11, 2025 |
| Priority date | — |
| Expiry date | Nov 26, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2806
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron microscope includes: an electron source, which is configured to generate an electron beam; a first beam conduit, which is configured to accelerate the electron beam; a second beam conduit, which is configured to accelerate the electron beam; a first detector, which is disposed between the first beam conduit and the second beam conduit and configured to receive secondary electrons generated by the electron beam acting on a sample to be tested; and a control electrode, which is disposed between the first detector and an optical axis of the electron beam and configured to change the direction of movement of backscattered electrons and the secondary electrons generated by the electron beam acting on said sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.