Flow control system, method, and apparatus
US12228435B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 8, 2020 |
| Grant date | Feb 18, 2025 |
| Priority date | — |
| Expiry date | May 20, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0635
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In one embodiment, a method for delivering a gas at a predetermined rate includes providing a gas flow control apparatus comprising a gas flow path extending from a gas inlet to a gas outlet, a proportional valve coupled to the gas flow path, an on/off valve coupled to the gas flow path, a volume being defined between the proportional valve and the on/off valve, and a flow restrictor having a flow impedance located downstream of the proportional valve. The volume is pressurized with the gas to a target set point by opening the proportional valve while the on/off valve is in an off state. Finally, the on/off valve is moved to the on state, delivering gas to the gas outlet.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.