RRAM process integration scheme and cell structure with reduced masking operations
US12232335B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 18, 2022 |
| Grant date | Feb 18, 2025 |
| Priority date | — |
| Expiry date | Feb 2, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11C2213/77
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Disclosed is a resistive random access memory (RRAM). The RRAM includes a bottom electrode made of tungsten and a switching layer made of hafnium oxide disposed above the bottom electrode, wherein the switching layer includes a switchable filament. The RRAM further includes a resistive layer disposed above the switching layer and a bit line disposed above the resistive layer, wherein the resistive layer extends laterally to connect two or more memory cells along the bit line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.