Methods for determining the virtual source location of a liquid metal ion source
US12237142B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Jun 16, 2022 |
| Grant date | Feb 25, 2025 |
| Priority date | — |
| Expiry date | Apr 22, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2826
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Variations in charged-particle-beam (CPB) source location are determined by scanning an alignment aperture that is fixed with respect to a beam defining aperture in a CPB, particularly at edges of a defocused CPB illumination disk. The alignment aperture is operable to transmit a CPB portion to a secondary emission surface that produces secondary emission directed to a scintillator element. Scintillation light produced in response is directed out of a vacuum enclosure associated with the CPB via a light guide to an external photodetection system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.