Ceramic susceptor and method of manufacturing same
US12237204B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 7, 2024 |
| Grant date | Feb 25, 2025 |
| Priority date | — |
| Expiry date | Aug 7, 2044 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB32B2307/7376
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present disclosure relates to a ceramic susceptor. In a method of manufacturing a base body of a ceramic susceptor of the present disclosure, which includes a lower plate and an upper plate, which are each made of a metal-ceramic composite and bonded to each other, the method includes: sequentially laminating a first active metal layer, a first aluminum layer, and a brazing filler layer on a bonding surface of the upper plate; sequentially laminating a second active metal layer and a second aluminum layer on a bonding surface of the lower plate; and brazing-bonding the lower plate and the upper plate with the brazing filler layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.