Patent · US Active

Semiconductor device and power amplifier

US12237382B2 · kind B2 · utility

0Cited by
2References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 30, 2022
Grant dateFeb 25, 2025
Priority date
Expiry dateJul 30, 2043

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/62
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device includes: a substrate; a channel layer disposed on the substrate, wherein the channel layer is made of GaN; a barrier layer disposed on the channel layer, wherein the barrier layer is made of AlzGa1-zN; and an inserting structure inserted between the channel layer and the barrier layer. The inserting structure includes: a first inserting layer disposed on the channel layer, wherein the first inserting layer is made of AlxGa1-xN; and a second inserting layer disposed on the first inserting layer, wherein the second inserting layer is made of AlyGa1-yN, and y is greater than x. The semiconductor device further includes: a gate electrode disposed on the barrier layer; a source electrode and a drain electrode disposed on the barrier layer and respectively at opposite sides of the gate electrode; and a spike region formed below at least one of the source electrode and the drain electrode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.