Patent · US Active

Detection, correction, and compensation of coupling effects of microelectromechanical system (MEMS) axes of a two-dimensional scanning structure

US12237840B2 · kind B2 · utility

0Cited by

1References

19Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Norbert Druml · Graz, AT
Stephan Gerhard Albert · Munich, DE
Franz Michael Darrer · Graz, AT
Philipp Greiner · Graz, AT

Key dates

Filing date	Aug 16, 2021
Grant date	Feb 25, 2025
Priority date	—
Expiry date	Oct 8, 2043

Classification

Technology area (CPC H)Electricity
CPC primaryH03B5/32
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

An oscillator control system includes an oscillator structure configured to oscillate about first and second rotation axes according to a Lissajous pattern, wherein an oscillation about the second rotation axis imparts a cross-coupling error onto an oscillation about the first rotation axis, and wherein the cross-coupling error changes in accordance with a Lissajous position within the Lissajous pattern; and a driver circuit that includes a phase-locked loop (PLL) configured to regulate a driving signal that drives the oscillation about the first rotation axis. The PLL is configured to generate a PLL signal based on a phase error of the oscillation about the first rotation axis. The PLL includes a compensation circuit configured to receive the PLL signal and the Lissajous position within the Lissajous pattern, apply a compensation value to the PLL signal to generate a compensated PLL signal used for generating the driving signal based on the Lissajous position.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.