Silicon carbide nanoneedles and fabrication thereof

US12246155B2 · kind B2 · utility

Assignee

• Lawrence Livermore National Security, LLC · US

Inventors

• Clint Frye · Livermore, US
• Mihail Bora · Livermore, US
• Adam Conway · San Francisco, US
• Devin Joseph Funaro · Livermore, US
• Paulius Vytautas Grivickas · Livermore, US
• David Lawrence Hall · San Ramon, US
• Lars Voss · Livermore, US

Key dates

• Filing date: Aug 6, 2020
• Grant date: Mar 11, 2025
• Expiry date: Dec 22, 2043

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2201/055
• WIPO field: Medical technology
• WIPO sector: Instruments

Abstract

A product includes an elongated carbon-containing pillar having a bottom and a tip opposite the bottom. The width of the pillar measured 1 nm below the tip is less than 700 nm. A method includes masking a carbon-containing single crystal for defining masked regions and unmasked regions on the single crystal. The method also includes performing a plasma etch for removing portions of the unmasked regions of the single crystal, thereby defining a pillar in each unmasked region, and performing a chemical etch on the pillars at a temperature between 1200° C. and 1600° C. for selectively reducing a width of each pillar.