Differential measurement system
US12248255B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2021 |
| Grant date | Mar 11, 2025 |
| Priority date | — |
| Expiry date | Oct 21, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70975
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for measuring the difference between a property of a first target and a property of a second target, the system comprising a first member and a second member, wherein the first member comprises a first pattern, and the speed of rotation of the first member is configured to be based on the property of the first target; and the second member comprises a second pattern wherein, the speed of rotation of the second member is configured to be based on the property of the second target, further wherein the first and second pattern are angularly-varying and are configured to generate an interference pattern by their interaction when the first and second members have a relative difference in their rotational speeds, the interference pattern being indicative of the magnitude of this difference.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.