Patent · US Active

Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system

US12249478B2 · kind B2 · utility

0Cited by

89References

25Claims

0Family size

Assignee

Carl Zeiss MultiSEM GmbH · DE

Inventors

Hans Fritz · Grabs, CH
Andras G. Major · Oberkochen, DE
Dirk Zeidler · Oberkochen, DE
Arne Thoma · Heidenheim, DE
Joerg Jacobi · Herbrechtingen, DE

Key dates

Filing date	Dec 9, 2021
Grant date	Mar 11, 2025
Priority date	—
Expiry date	Jan 7, 2043

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2817
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A particle beam system includes a multi-beam particle source and a magnetic multi-deflector array. The magnetic multi-deflector array includes a coil that is arranged such that, during use of the particle beam system, a multiplicity of individual particle beams substantially passes through the first coil so that they are deflected in an azimuthal direction to correct an azimuthal telecentricity error of the particle beam system so that the individual particle beams telecentrically impinge on an object plane of the particle beam system.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.