Adhesive for pellicle, pellicle for photo mask and method for manufacturing the same
US12258494B2 · kind B2 · utility
0Cited by
7References
18Claims
0Family size
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Key dates
| Filing date | Aug 22, 2023 |
| Grant date | Mar 25, 2025 |
| Priority date | — |
| Expiry date | Aug 22, 2043 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08K5/13
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
An adhesive for a pellicle, the adhesive including a phenol compound, the phenol compound having at least two hydroxyl groups, a polymer having a hydroxyl group or an amine group, and water.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.