Micromirror arrays
US12259546B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 5, 2020 |
| Grant date | Mar 25, 2025 |
| Priority date | — |
| Expiry date | Mar 6, 2042 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0163
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micromirror array includes a substrate, a plurality of mirrors for reflecting incident radiation, and for each mirror of the plurality of mirrors, a respective post connecting the substrate to the respective mirror. The micromirror array further includes, for each mirror of the plurality of mirrors, one or more electrostatic actuators connected to the substrate for applying force to the respective post to displace the respective post relative to the substrate, thereby displacing the respective mirror. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.