3D fiducial for precision 3D NAND channel tilt/shift analysis
US12260583B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 9, 2021 |
| Grant date | Mar 25, 2025 |
| Priority date | — |
| Expiry date | Feb 9, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B43/27
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Systems for and methods for generating precise structure reconstruction using slice and view images, are disclosed. An example method comprises, obtaining a slice and view images of a sample that depicts a 3D fiducial and cross-sections of a structure in the sample. The 3D fiducial is configured such that when a layer of material having a uniform thickness is removed from a surface of the sample that includes the 3D fiducial the cross-sectional shape of the 3D fiducial in the new surface is consistent. Relative positions are determined between the 3D fiducial the cross-sections of the structure in individual images. Positional relationships are then determined between the cross-sections of the structure in different images in a common reference frame based on the relative positions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.