Loadlock apparatus and substrate processing apparatus including the same
US12264747B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 19, 2022 |
| Grant date | Apr 1, 2025 |
| Priority date | — |
| Expiry date | Aug 16, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67775
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A loadlock apparatus includes a loadlock chamber including a first opening and a second opening separated in a vertical direction; a first slit valve including a first valve plate configured to move between a first open position where the first opening is open and a first closed position where the first opening is closed, the first open position being a position moved downward from the first closed position; and a second slit valve including a second valve plate configured to move between a second open position where the second opening is open and a second closed position where the second opening is closed, the second open position being a position moved upward from the second closed position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.