Beomsoo Hwang
8Patents
0h-index
23Co-inventors
34Inventor score
Filing activity: Jan 11, 2022 → Mar 3, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12412768B2 | Semiconductor substrate processing apparatus | Electricity | 0 | Active |
| US12224191B2 | Wafer transfer apparatus with aligner | Performing Operations; Transporting | 0 | Active |
| US12264747B2 | Loadlock apparatus and substrate processing apparatus including the same | Electricity | 0 | Active |
| US12217984B2 | Wafer processing apparatus including EFEM and method of processing wafer | Electricity | 0 | Active |
| US11920689B2 | Loose type pneumatic valve and loose type pneumatic valve module including the same | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US12214491B2 | Transfer robot for transferring gas container, gas supply cabinet, and gas supply system including the same | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US11804393B2 | Wafer processing apparatus including equipment front end module (EFEM) and wafer processing method using the same | Electricity | 0 | Active |
| US11846391B2 | Gas supply apparatus | Mechanical Engineering; Lighting; Heating | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.