Flow sensor element
US12264954B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 16, 2021 |
| Grant date | Apr 1, 2025 |
| Priority date | — |
| Expiry date | Dec 30, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K7/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An object is to provide a flow sensor element is non-directional and has an excellent sensor sensitivity. A flow sensor element includes a base body having a spherical shape, and a temperature-sensitive film pattern that is disposed over the entirety of a surface of the base body, and changes in an electrical resistance value due to a change in temperature. It is preferable that the temperature-sensitive film pattern be formed by trimming a temperature-sensitive film that has been formed on the surface of the base body. In the flow sensor element, the temperature-sensitive film pattern can be disposed over the entirety of the surface of the base body having a spherical shape. This enables a constant sensor sensitivity to be obtained regardless of a direction of a fluid, and the accuracy of detection of a flow rate can be improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.